Quantitative SEM characterisation of ceramic target prior and after magnetron sputtering: a case study of aluminium zinc oxide-Reference-Cited by-同舟云学术

Quantitative SEM characterisation of ceramic target prior and after magnetron sputtering: a case study of aluminium zinc oxide

Published:2020-09-28 Issue:3 Volume:281 Page:190-201
ISSN:0022-2720
Container-title:Journal of Microscopy
language:en
Short-container-title:Journal of Microscopy

Author:

JAHANGIRI ALI REZA¹²³⁴^ORCID,RAJABI KALVANI PAYAM²³⁴^ORCID,SHAPOURI SAMANEH²³⁴^ORCID,SARI AMIRHOSSEIN²³^ORCID,ŢĂLU ŞTEFAN⁵^ORCID,JALILI YOUSEF SEYED²³⁴

Affiliation:

1. NanoLund Lund University Box 118, 22100 Lund Sweden

2. Department of Physics, Faculty of Science, Science and Research Branch Islamic Azad University Tehran Iran

3. Plasma Physics Research Centre, Science and Research Branch Islamic Azad University Tehran Iran

4. Nano‐Optoelectronics Laboratory, Sheykh Bahaee Research Complex, Science and Research Branch Islamic Azad University Tehran Iran

5. The Directorate of Research, Development and Innovation Management (DMCDI) Technical University of Cluj‐Napoca Cluj‐Napoca Cluj Romania

Publisher

Wiley

Subject

Histology,Pathology and Forensic Medicine

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1111/jmi.12961

Reference72 articles.

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4. Ionic screening and dissociation are crucial for understanding chemical self-propulsion in polar solvents

5. Sintering

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