Preparation of Titanium Nitride Films from Amide Precursors Synthesized by Electrolysis
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.2003.tb03298.x/fullpdf
Reference8 articles.
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2. Investigation of the Growth of TiN Thin Films from Ti(NMe2)4 and Ammonia;Prybyla;J. Electrochem. Soc.,1993
3. Electrochemically Prepared Precursors for the Formation of Non-oxides;Russel;J. Electrochem. Soc.,1992
4. Aluminum Nitride Ceramics Prepared by a Pyrolytic Route;Distler;J. Mater. Sci.,1992
5. Electrochemical Synthesis of Ceramic Materials: II, Synthesis of AIN and an AIN Polymer Precursor: Chemistry and Materials Characterization;Wade;J. Am. Chem. Soc.,1992
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