Design and Fabrication of Transparent and Gas-Tight Optical Windows in Low-Temperature Co-Fired Ceramics

Author:

Welker Tilo1,Geiling Thomas1,Bartsch Heike1,Müller Jens1

Affiliation:

1. Department of Electronics Technology; Faculty of Electrical Engineering and Information Technology; Institute of Micro- and Nanotechnologies MacroNano; ®; Ilmenau University of Technology; 98693; Ilmenau; Germany

Publisher

Wiley

Subject

Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites

Reference30 articles.

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3. LTCC Based Fluidic Components for Chemical Applications;Thelemann;J. Microelectron. Electron. Packag.,2007

4. H. Bartsch de Torres Embossing of Microfluidic Structures in Ceramic Multilayers Proceedings of the Smart Systems Integration Conference 2007

5. Fully Integrated Bridge-type Anemometer in LTCC-based Microfluidic Systems;Bartsch de Torres;Adv. Sci. Technol,2008

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