Miniaturized SAW Motor with 100 MHz Drive Frequency
Author:
Affiliation:
1. Dept. Information Processing, Tokyo Institute of Technology
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/ieejsmas/126/4/126_4_166/_pdf
Reference6 articles.
1. Piezoelectric micromotors for microrobots
2. Ultrasonic linear motor using surface acoustic waves
3. (3) M. K. Kurosawa et al: “Optimization of Slider Contact Face Geometry for Surface Acoustic Wave Motor”, Proc. IEEE Int. Micro Electro Mech. Syst. Conf., pp. 252-255 (2001)
4. Optimum contact conditions for miniaturized surface acoustic wave linear motor
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