Thermal Design for Infrared Sensor Pixel Operated at Atmospheric Pressure

Author:

Shiokawa Yuya1,Nakano Tatsuya2,Maeda Naoki1,Kimata Masafumi1,Takahata Akihiro3

Affiliation:

1. Ritsumeikan University

2. Former Ritsumeikan University

3. Kodenshi Corp.

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference6 articles.

1. (2) R. A. Wood, C. J. Han, and P. W. Kruse : “Integrated Uncooled infrared detector imaging arrays”, Proceedings of the 1992 IEEE Solid State Sensor and Actuator Workshop, pp. 132-135 (1992)

2. A 1024-element bulk-micromachined thermopile infrared imaging array

3. (4) U. Munch, D. Jaeggi, et al. : “Industrial Fabrication Technology for CMOS Infrared Sensor Arrays”, Digest Tech. Papers Transducers 97, Vol. 1, pp. 205-208 (1997)

4. (5) M. Hirota, Y. Nakajima, et al.: “Thermoelectric Infrared Sensor Arrays and Vehicle Applications”, ITE Technical Report, Vol. 25, No. 19, pp. 19-24 (2001)

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