Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array-Reference-Cited by-同舟云学术

Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array

Published:2018 Issue:2 Volume:138 Page:66-73
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Uno Akiko¹,Hirai Yoshikazu¹,Tsuchiya Toshiyuki¹,Tabata Osamu¹

Affiliation:

1. Nano/Micro System Engineering Laboratory, Department of Micro Engineering, Kyoto University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/138/2/138_66/_pdf

Reference7 articles.

1. (1) E. Dalimier and C. Dainty : “Comparative analysis of deformable mirrors for ocular adaptive optics”, Optics Express, Vol. 13, No. 11, pp. 4275-4285 (2002)

2. (2) E. J. Fernández, L. Vabre, B. Hermann, A. Unterhuber, B. Považay, and W. Drexler : “Adaptive optics with a magnetic deformable mirror: applications in the human eye”, Optics Express, Vol. 14, Issue 20, pp. 8900-8917 (2006)

3. (3) T. G. Bifano, J. Perreault, R. K. Mali, and M. N. Horenstein : “Microelectromechanical Deformable Mirrors”, IEEE, Vol. 5, Issue 1, pp. 83-89 (1999)

4. (4) T. Tsuchiya, V. K. Singh, Y. Hirai, and O. Tabata : “Large-displacement electrostatic deformable mirror with movable bottom electrodes”, The 2014 International Conference on Optical MEMS and Nanophotonics (OMN2014), Glasgow, Scotland, pp. 119-120 (2014)

5. (5) A. Uno, V. K. Singh, Y. Hirai, T. Tsuchiya, and O. Tabata : “Fabrication of MEMS Deformable Mirror Actuated by Electrostatic Piston Array”, The 8th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2016), Kanazawa, Japan, pp. 113-114 (2016)