Ultra-Small Laser Scanning Module with High Accuracy Alignment-Reference-Cited by-同舟云学术

Ultra-Small Laser Scanning Module with High Accuracy Alignment

Published:2009 Issue:12 Volume:129 Page:433-438
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Yoshihara Shinji¹,Ohara Junji¹,Abe Katsunori¹,Takeuchi Yukihiro¹,Kawahara Nobuaki¹

Affiliation:

1. Research Laboratories, DENSO CORPORATION

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://www.jstage.jst.go.jp/article/ieejsmas/129/12/129_12_433/_pdf

Reference6 articles.

1. (1) Y. Kimura, N. Matsushita, H. Koto, K. Abe, and K. Astumi : “High Power Pulsed Diode Laser for Automotive Scanning Radar Sensor”, SPIE Proceedings, Vol. 3888, pp. 759-766 (2000)

2. (2) K. Astumi, K. Abe, H. Koto, and K. Michiyama : “Highly Reliable High Power Diode Laser for Laser Radar Application”, SAE 2004-01-1594 (2004)

3. (3) A. D. Yalcinkaya and H. Urey : “Journal of Microelectromechanical Systems”, Vol. 15, No. 4 (2006-8)

4. (4) K. Takahashi and K. Saruta : “Technical Meeting on Sensors and Micromachines 2004”, pp. 95-99 (2004)

5. (5) J. Ohara, K. Kano, and Y. Takeuchi : “A New Deep Reactve Ion Etching Process by Dual Sidewall Protection Layer”, Technical digest of MEMS 2000, pp. 277-282 (2000)

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