Comparative Finite Element Analysis of a Voice Coil Actuator and a Hybrid Reluctance Actuator
Author:
Affiliation:
1. Christian Doppler Laboratory for Precision Engineering for Automated In-Line Metrology, Automation and Control Institute (ACIN), TU Wien
2. Automation and Control Institute (ACIN), TU Wien
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering,Energy Engineering and Power Technology,Automotive Engineering
Link
https://www.jstage.jst.go.jp/article/ieejjia/8/2/8_192/_pdf
Reference35 articles.
1. (1) H. Butler: “Position control in lithographic equipment”, IEEE Control Systems, Vol. 31, No. 5, pp. 28-47 (2011)
2. (2) R. Saathof, M. Thier, R. Hainisch, and G. Schitter: “Integrated system and control design of a one dof nano-metrology platform”, Mechatronics, Vol. 47, pp. 88-96 (2017)
3. (3) S. Ito and G. Schitter: “Atomic force microscopy capable of vibration isolation with low-stiffness z-axis actuation”, Ultramicroscopy, Vol. 186, pp. 9-17 (2018)
4. (4) J. R. Brauer: “Magnetic Actuators and Sensors, 2nd edition”, Wiley-IEEE Press (2014)
5. (5) A. Okyay, M. B. Khamesee, and K. Erkorkmaz: “Design and optimization of a voice coil actuator for precision motion applications”, IEEE Transactions on Magnetics, Vol. 51, No. 6 (2015)
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