Optical Emission Spectroscopy Measurement of Processing Plasmas
Author:
Affiliation:
1. Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering
Link
http://www.jstage.jst.go.jp/article/ieejfms/130/10/130_10_892/_pdf
Reference23 articles.
1. (2) T. Fujimoto : Plasma Spectroscopy, Oxford Science Publications (2004)
2. Plasma and Spectroscopic Analysis V. Plasma Diagnostics by Spectroscopic Methods
3. (4) J. Röpcke, P. B. Davies, M. Känig, and B. P. Lavrov : “Diagnostics of non-equilibrium molecular plasma using emission and absorption spectroscopy”, R. Hippler, S. Pfau, M. Schmidt, and K. H. Schoenbach, Ed., Low Temperature Plasma Phys, Ch. 7, Wiley-VCH (2000)
4. Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
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