Affiliation:
1. Yokohama National University
2. Nikon Corporation
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering
Reference7 articles.
1. (1) S. Wakui: “Roles of an Active Anti-Vibration Apparatus in Precision Positioning”, J. JSPE, Vol. 73, No. 4, pp. 405-409 (2007) (in Japanese)
2. (2) K. Komata, S. Iguchi, H. Kadono, S. Toyooka, and N. Arai: “Study on Laser Direct Imaging System for Next Generation to Use Statistical Interferometry”, SAITEC, Vol. 4 (2006) (in Japanese)
3. (3) H. Fujimoto, Y. Hori, and A. Kawamura: “Perfect Tracking Control Method Based on Multirate Feedforward Control”, T. SICE, Vol. 36, No. 9, pp. 766-772 (2000) (in Japanese)
4. (4) K. Fukushima, H. Fujimoto, and S. Nakagawa: “Short-Span Seeking Control of Hard Disk Drive with Vibration Suppression PTC”, T. IEE Japan, Vol. 126-D, No. 6, pp. 706-712 (2006-6) (in Japanese)
5. (5) K. Fukushima and H. Fujimoto: “Vibration Suppression Control of Hard Disk Drives with Multirate Feedback Control and High-order Vibration Suppression PTC”, in Proc. SICE Conf., 065-3-2 (2007) (in Japanese)
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