Electron Energy Distribution Functions in an O2 Glow Discharge

Abstract

A Langmuir probe technique has been used to measure electron energy distribution functions in the positive column of a DC glow discharge in oxygen. The electron energy distribution function is shown to fit a functional form given by f(E) = CE1/2 exp (−BEn) where n = 1.6 ± 0.1; the average electron energies lie between 4.4 and 5.0 eV.