Affiliation:
1. University of Waterloo, Department of Electrical and Computer Engineering, 200 University Avenue W., Waterloo, ON N2L 3G1, Canada.
Abstract
Low thermal budget rapid thermal annealing is a promising method of forming highly crystalline silicon thin films on silicon substrates for heterojunction solar cells. In this work, the extent of crystallization was examined by Raman and ultraviolet reflectance spectroscopy, and ellipsometry was used to derive film optical properties. Solar cells were fabricated and analyzed using dark and illuminated current–voltage characteristics, external quantum efficiency, and solar simulator measurements with device efficiency approaching 14%.
Publisher
Canadian Science Publishing
Subject
General Physics and Astronomy
Reference12 articles.
1. Development of New a-Si/c-Si Heterojunction Solar Cells: ACJ-HIT (Artificially Constructed Junction-Heterojunction with Intrinsic Thin-Layer)
2. R. Kingi, Y. Wang, S.J. Fonash, O. Awadelkarim, and J. Mehlhaff. Comparison Between Rapid Thermal and Furnace Annealing for A-Si Solid Phase Crystallization. MRS Proceedings, 424, 237 (1996). 10.1557/PROC-424-237.
3. I. Tobias, C. del Canizo, and J. Alonso. In Photovoltaic Handbook of Science and Engineering. Edited by A. Luque and S. Hegedus. John Wiley and Sons, Chichester, UK. 2011. p. 273.
4. Probing the Crystallinity of Evaporated Silicon Films by Raman Scattering
5. Real-time optical spectroscopy study of solid-phase crystallization in hydrogenated amorphous silicon
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