Kinetic Monte Carlo Study on Boron Diffusion with Carbon Pre-implantation after a Pre-amorphization Process
-
Published:2011-05-13
Issue:5(1)
Volume:58
Page:1434-1438
-
ISSN:0374-4884
-
Container-title:Journal of the Korean Physical Society
-
language:en
-
Short-container-title:J. Korean Phy. Soc.
Author:
Park Soon Yeol,Sung Kun-Sik,Won Taeyoung
Publisher
Korean Physical Society
Subject
General Physics and Astronomy