Generation of 193-nm Femtosecond Light Pulses and Their Application to Photomask Repair
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Published:2007-08-14
Issue:2
Volume:51
Page:498-502
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ISSN:0374-4884
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Container-title:Journal of the Korean Physical Society
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language:en
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Short-container-title:J. Korean Phy. Soc.
Publisher
Korean Physical Society
Subject
General Physics and Astronomy