The Study on the Precursor Adsorption using in-situ Nanoparticle-assisted Attenuated Total Reflectance Infrared Spectroscopy-Reference-Cited by-同舟云学术

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The Study on the Precursor Adsorption using in-situ Nanoparticle-assisted Attenuated Total Reflectance Infrared Spectroscopy

Published:2015-07-30 Issue:4 Volume:24 Page:90-95
ISSN:2288-6559
Container-title:Applied Science and Convergence Technology
language:en
Short-container-title:Applied Science and Convergence Technology

Author:

Shin Jae-Soo,Park Myung-Su,Jung Won-Jun,Park Hee-Jung,Yun Ju-Young,Kim TaeWan,Kang Sang-Woo

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Link

http://ocean.kisti.re.kr/downfile/crosscheck/kvs/JAKO201523051805180.pdf

Reference5 articles.

1. Coating Materials

2. MOCVD of ZrO2 films from bis(t-butyl-3-oxo-butanoato)zirconium(IV): some theoretical (thermodynamic) and experimental aspects

3. Synthesis and Electrical Characterization of ZrO2 Thin Films on Si(100)

4. Attenuated total reflectance spectroscopy of coumarin organosilane molecules adsorbed on a fused silica surface

5. Structural and electrical properties of atomic layer deposited Al-doped ZrO2 films and of the interface with TaN electrode

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improving precursor adsorption characteristics in ATR-FTIR spectroscopy with a ZrO2 nanoparticle coating;Journal of Nanoparticle Research;2017-02

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