Deep Neural Network Modeling of Multiple Oxide/Nitride Deposited Dielectric Films for 3D-NAND Flash
Author:
Affiliation:
1. Department of Electronic Engineering, Myongji University, Yongin 17058, Republic of Korea
2. Plasma Technology Research Center, NFRI, Gunsan 54004, Republic of Korea
Funder
Ministry of Trade, Industry and Energy
Korea Semiconductor Research Consortium
Publisher
The Korean Vacuum Society
Subject
Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)
Link
http://pdf.medrang.co.kr/ASCT/2020/029/ASCT029-06-14.pdf
Reference19 articles.
1. J. Lee, J. Jang, J. Lim, Y. G. Shin, K. Lee, and E. Jung, Proceedings of the IEEE International Electron Devices Meeting (San Francisco, CA, USA, 2016). p. 11.2.1-11.2.4.
2. In-Situ Monitoring of Multiple Oxide/Nitride Dielectric Stack PECVD Deposition Process
3. Thin film thickness measurement: A comparison of various techniques
4. K. H. Kim, J. Korean Solar Energy 39, 11 (2019).
5. Spectroscopic ellipsometry: a historical overview
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A Review of Thin-film Thickness Measurements using Optical Methods;International Journal of Precision Engineering and Manufacturing;2024-06-22
2. Bridging Nanomanufacturing and Artificial Intelligence—A Comprehensive Review;Materials;2024-04-02
3. Prediction by a hybrid machine learning model for high-mobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method;Journal of Applied Physics;2023-10-24
4. Semiconductor Multilayer Nanometrology with Machine Learning;Nanomanufacturing and Metrology;2023-05-04
5. 3D NAND Oxide/Nitride Tier Stack Thickness Measurements with Infrared Metrology;2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2023-05-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3