Selective etching of fs-laser inscribed high aspect ratio microstructures in YAG
Author:
Funder
Deutsche Forschungsgemeinschaft (DFG)
Publisher
The Optical Society
Subject
Electronic, Optical and Magnetic Materials
Reference28 articles.
1. Femtosecond laser micromachining in transparent materials
2. Optical waveguides in crystalline dielectric materials produced by femtosecond-laser micromachining
3. Ultrafast laser inscription: perspectives on future integrated applications
4. Femtosecond laser three-dimensional micro- and nanofabrication
5. Crystalline Waveguide Lasers in the Visible and Near-Infrared Spectral Range
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2. Helical hollow channel waveguide in YAG fabricated by femtosecond laser enhanced wet etching;Optics Letters;2024-04-29
3. Fabrication of high-aspect-ratio fused silica microstructures with large depths using Bessel-beam femtosecond laser-assisted etching;Optics & Laser Technology;2024-03
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5. Femtosecond laser-induced optical waveguides in crystalline garnets: Fabrication and application;Optics & Laser Technology;2023-09
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