Abstract
We propose a robust and accurate compensation method for phase aberrations based on the iterative outlier detection and refinement (ODR) rule. This method does not require additional steps to select the known flat region manually or by image segmentation. Based on the proposed method, the phase aberration in regions of a specimen can be detected and refined iteratively. Then, the least squares fitting can be carried out to estimate the coefficients of Zernike polynomials and obtain the accurate phase aberration finally. Computer simulations and real experiments validate the feasibility and effectiveness, and the results show that the proposed method is robust to noise and has superior accuracy even when the specimen occupies half of the field of view.
Funder
National Natural Science Foundation of China
Guangxi Key Laboratory of Automatic Detecting Technology and Instruments
Innovation Project of GUET Graduate Education