Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers
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Published:1997-12-01
Issue:34
Volume:36
Page:9005
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ISSN:0003-6935
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Container-title:Applied Optics
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language:en
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Short-container-title:Appl. Opt.
Author:
Mendeleyev Vladimir Ya.
Publisher
The Optical Society
Cited by
22 articles.
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