Direct detection of polystyrene equivalent nanoparticles with a diameter of 21 nm (∼λ/19) using coherent Fourier scatterometry
Author:
Funder
Stichting voor de Technische Wetenschappen
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
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1. Wafer-scale low-loss lithium niobate photonic integrated circuits
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1. Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure;Measurement Science and Technology;2024-04-02
2. Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples;IEEE Transactions on Semiconductor Manufacturing;2024-02
3. Coherent Fourier scatterometry: a holistic tool for inspection of isolated particles or defects on gratings;Applied Optics;2023-10-02
4. Detection of geometrical patterns of self-assembled gold nanospheres and top-down fabricated nanostructures using coherent Fourier scatterometry;Optical Measurement Systems for Industrial Inspection XIII;2023-08-15
5. Direct detection of polystyrene equivalent nanoparticles with diameter of 21 nm (∼λ/19) using coherent Fourier scatterometry: erratum;Optics Express;2022-07-29
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