High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector-Reference-Cited by-同舟云学术

High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector

Published:2023-04-14 Issue:9 Volume:31 Page:14212
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Eschen Wilhelm¹²,Liu Chang¹²,Penagos Molina Daniel S.¹²^ORCID,Klas Robert¹²³^ORCID,Limpert Jens¹²³,Rothhardt Jan¹²³

Affiliation:

1. GSI Helmholtzzentrum für Schwerionenforschung

2. Friedrich-Schiller-University Jena

3. Fraunhofer Institute for Applied Optics and Precision Engineering

Abstract

We present high-speed and wide-field EUV ptychography at 13.5 nm wavelength using a table-top high-order harmonic source. Compared to previous measurements, the total measurement time is significantly reduced by up to a factor of five by employing a scientific complementary metal oxide semiconductor (sCMOS) detector that is combined with an optimized multilayer mirror configuration. The fast frame rate of the sCMOS detector enables wide-field imaging with a field of view of 100 µm × 100 µm with an imaging speed of 4.6 Mpix/h. Furthermore, fast EUV wavefront characterization is employed using a combination of the sCMOS detector with orthogonal probe relaxation.

Funder

Fraunhofer-Gesellschaft

Helmholtz Association

Thüringer Ministerium für Bildung, Wissenschaft und Kultur

European Social Fund

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

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