Improved phase-shifting method for pinhole point diffraction interferometer based on a precise driving of the substrate

Abstract

We report a phase-shifting method based on a pinhole point diffraction interferometer. Using the random two-frame phase-shifting algorithm, the piezo electric transducer (PZT) drives the pinhole moving a certain step length along the axis of the tested aspheric mirror. In each step, the CCD collects an interferogram. Then two interferograms are processed by the phase-shifting algorithm. After that, we can acquire the phase map of the interferograms. This technique has great potential for increasing the measuring aperture of the aspheric mirror in the pinhole point diffraction interferometer (PPDI) under the premise of keeping the advantages of PPDI of which the optic devices, as well as error sources, are few behind the substrate.