Deep-learning-assisted sidewall profiling white light interferometry system for accurately measuring 3D profiles and surface roughness on the groove sidewalls of precision components

Abstract

The accurate measurement of surface three-dimensional (3D) profile and roughness on the groove sidewalls of components is of great significance to diverse fields such as precision manufacturing, machining processes, energy transportation, medical equipment, and semiconductor industry. However, conventional optical measurement methods struggle to measure surface profiles on the sidewall of a small groove. Here, we present a deep-learning-assisted sidewall profiling white light interferometry system, which consists of a microprism-based interferometer, an optical path compensation device, and a convolutional neural network (CNN), for the accurate measurement of surface 3D profile and roughness on the sidewall of a small groove. We have demonstrated that the sidewall profiling white light interferometry system can achieve a measurement accuracy of 2.64 nm for the 3D profile on a groove sidewall. Moreover, we have demonstrated that the CNN-based single-image super-resolution (SISR) technique could improve the measurement accuracy of surface roughness by over 30%. Our system can be utilized in cases where the width of the groove is only 1 mm and beyond, limited only by the size of the microprism and the working distance of the objective used in our system.