High-aperture low-coherence interferometer with a diffraction reference wave

Author:

Toropov Mikhail1ORCID,Chkhalo Nikolay1,Malyshev Ilya1,Salashchenko Nikolay1

Affiliation:

1. Institute for Physics of Microstructures of the Russian Academy of Science

Abstract

A high-aperture low-coherence interferometer with a diffraction reference wave based on a tipped single-mode optical fiber was proposed and investigated. Due to the usage of the central least-aberrated region of the diffracted wavefront, the interferometer comprise record working aperture among known PDIs. The interferometer makes it possible to study samples with a reflectance that varies over a wide range. A demonstration of the use of this interferometer for high-precision measurements of a spherical mirror is presented. Sub-nanometer reproducibility of measurements in terms of the peak to valley (PV) parameter and sub-angstrom reproducibility in terms of the rms are demonstrated.

Funder

Russian Science Foundation

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

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