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On-line surface inspection using cylindrical lens–based spectral domain low-coherence interferometry

  • Published:2014-08-18 Issue:24 Volume:53 Page:5510
  • ISSN:1559-128X
  • Container-title:Applied Optics
  • language:en
  • Short-container-title:Appl. Opt.

Author:

Tang Dawei,Gao Feng,Jiang X.

Funder

Engineering and Physical Sciences Research Council (EPSRC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Single-shot dispersive interferometry for inline surface inspection;Optical Metrology and Inspection for Industrial Applications X;2023-11-27

2. Nanometer resolution of 2D single-shot low-coherence & comb-based profilometry based on the effect of discrete height of spatial phase modulator surface;Optics Communications;2023-11

3. Portable multiscale form measurement technique for structured specular surfaces based on phase measuring deflectometry;Visual Intelligence;2023-08-24

4. Design and Assessment of Phase-Shifting Algorithms in Optical Interferometer;International Journal of Precision Engineering and Manufacturing-Green Technology;2022-12-13

5. Development and application of line measurement Linnik-type white light dispersive interferometer;2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems;2022-07-08
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