Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems-Reference-Cited by-同舟云学术

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Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems

Published:2015-07-30 Issue:22 Volume:54 Page:6924
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Baranski Maciej,Bargiel Sylwester,Passilly Nicolas,Gorecki Christophe,Jia Chenping,Frömel Jörg,Wiemer Maik

Funder

Agence Nationale de la Recherche

Joint Programme Inter Carnot Fraunhofer PICF

Labex Action

Publisher

The Optical Society

Reference37 articles.

1. Optical biopsy and imaging using optical coherence tomography

2. A revolution in optical manipulation

3. MEMS Optical Scanners for Microscopes

4. Micromachined scanning confocal optical microscope

5. Endoscopic optical coherence tomography with new MEMS mirror

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3. Tunable metasurface-based waveplates - A proposal using inverse design;Comptes Rendus. Physique;2021-01-19

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