Author:
Huang Ming-Huang,Kim Hoon,Kim Chang-gyu,Park Soo-ho,Wang Jue
Abstract
Conformal AR coatings for DUV optics were performed via atomic layer deposition. 6-layer AR using Al2O3/SiO2 and 4-layer using HfO2/SiO2 were demonstrated with a high transmittance > 99% and a low reflectance at 266 nm.