Stand-alone diamond binary phase transmission gratings for the EUV band
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference14 articles.
1. X-ray/VUV transmission gratings for astrophysical and laboratory applications
2. Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source
3. Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands
4. Nanolithography with coherent extreme ultraviolet light
5. Soft x-ray monochromator with a varied-space plane grating for synchrotron radiation: design and evaluation
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1. Evaluation of the X-ray/EUV Nanolithography Facility at AS through wavefront propagation simulations;Journal of Synchrotron Radiation;2024-04-17
2. Fabrication of subwavelength periodic nanostructures using liquid immersion Lloyd’s mirror interference lithography;Optics Letters;2013-07-10
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