Author:
Wang Han,Chen Zhituo,Li Taige,Shi Yaocheng,Zhang A. Ping
Abstract
We demonstrate an integrated optofluidic chip with polymer optical Mach-Zehnder interferometer microsensors. A digital ultraviolet lithography is applied to fabricate high-quality polymer optical waveguide components and Mach-Zehnder interferometer microsensors for on-chip integrated label-free biodetection.