Author:
Luo D.,Sun X. W.,Liu Y. J.,Dai H. T.,Sheng O. Y.,Breese M. B. H.,Raszewski Z.
Cited by
1 articles.
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1. Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2010-05