Affiliation:
1. University of Science and Technology of China
Abstract
In order to reduce the cost of the piezo actuator array deformable mirror (DM), a piezoelectric DM driven by unimorph actuator arrays on multi-spatial layers is proposed. The actuator density can be multiplied by increasing the spatial layers of the actuator arrays. A low-cost DM prototype with 19 unimorph actuators located on three spatial layers is developed. The unimorph actuator can generate a wavefront deformation up to 11 µm at an operating voltage of 50 V. The DM can reconstruct typical low-order Zernike polynomial shapes accurately. The mirror can be flattened to 0.058 µm in RMS. Furthermore, a focal spot close to Airy spot is obtained in the far field after the aberrations of the adaptive optics testing system being corrected.
Funder
Ningbo Science and Technology Innovation 2025
Zhejiang Province Public Welfare Technology Application Research Project
Subject
Atomic and Molecular Physics, and Optics
Cited by
4 articles.
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