Phase-shifting interferometry with feedback control using heterodyne phase detection

Author:

Bitou Youichi

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Dynamic mode decomposition-based algorithm for phase-shifting interferometry in the presence of miscalibration and vibration;Optics and Photonics for Advanced Dimensional Metrology III;2024-06-18

2. Measured element phase-shifting interferometry with a single piezoelectric transducer and low-friction workbench;Optics and Lasers in Engineering;2020-03

3. Research on adaptive interferometric measurement of complex vibration environment;9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment;2019-01-18

4. Robust phase-shifting interferometry resistant to multiple disturbances;Journal of Optics;2018-03-01

5. Enhancement of vibration desensitising capability of iterative algorithms for phase-shifting interferometers;Optics and Lasers in Engineering;2017-11

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