Influence of thermal annealing and ultraviolet light irradiation on LaF_3 thin films at 193 nm
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Publisher
The Optical Society
Reference14 articles.
1. Vacuum ultraviolet loss in magnesium fluoride films
2. Optical properties of some solids in the vacuum ultraviolet
3. Development of optical coatings for 157-nm lithography I Coating materials
4. Film structure and optical constants of magnetron-sputtered fluoride films for deep ultraviolet lithography
5. Ultraviolet optical and microstructural properties of MgF_2 and LaF_3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation
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