Author:
Selvaraja Shankar Kumar,Chatterjee Avijit,Sushma Gali,Rawat Pravin,P Venkatachalam,Singh Radhakant,V Neethu E
Abstract
We present our work on silicon nitride(SiN) integrated devices and circuit development operating in the visible-to-infrared spectrum. Integration of SiN-on-SOI will be discussed along with Challenges and opportunities related to material and device integration.