SPARSE (spatially phase-retarded spectroscopic ellipsometry) for real-time film analysis
Author:
Funder
Chosun University
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference15 articles.
1. The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films
2. Spectroscopic ellipsometry data analysis: measured versus calculated quantities
3. Scanning ellipsometer by rotating polarizer and analyzer
4. Automatic rotating element ellipsometers: Calibration, operation, and real‐time applications
5. Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers
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