Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions-Reference-Cited by-同舟云学术

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Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

Published:2016-02-03 Issue:3 Volume:24 Page:2788
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Shimizu Yuki,Tan Siew Leng,Murata Dai,Maruyama Taiji,Ito So,Chen Yuan-Liu,Gao Wei

Funder

Japan Society for the Promotion of Science (JSPS)

Mazak Foundation

Mitutoyo Science Foundation

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference11 articles.

1. Design evaluation of a single-axis precision controlled positioning stage

2. Design and precision construction of novel magnetic-levitation-based multi-axis nanoscale positioning systems

3. The long-range scanning stage: a novel platform for scanned-probe microscopy

4. The Abbé principle revisited: An updated interpretation

5. Scales vs. Laser Interferometers Performance and Comparison of Two Measuring Systems

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3. A resolution improvement of measuring the pitch deviation of a diffraction scale grating based on the change in angles of diffraction of diffracted beams;Journal of Advanced Mechanical Design, Systems, and Manufacturing;2024

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