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Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

  • Published:2016-02-03 Issue:3 Volume:24 Page:2788
  • ISSN:1094-4087
  • Container-title:Optics Express
  • language:en
  • Short-container-title:Opt. Express

Author:

Shimizu Yuki,Tan Siew Leng,Murata Dai,Maruyama Taiji,Ito So,Chen Yuan-Liu,Gao Wei

Funder

Japan Society for the Promotion of Science (JSPS)

Mazak Foundation

Mitutoyo Science Foundation

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultra-sensitive absolute angular position sensing using pixelated metasurface;Advanced Sensor Systems and Applications XIII;2023-11-27

2. Autocollimation employing optical frequency comb;Optical Technology and Measurement for Industrial Applications Conference;2023-09-20

3. Feasible Resolution of Angular Displacement Measurement by an Optical Angle Sensor Based on Laser Autocollimation;Nanomanufacturing and Metrology;2023-08-28

4. Angle Measurement Based on Second Harmonic Generation Using Artificial Neural Network;Nanomanufacturing and Metrology;2023-07-27

5. Machine tool calibration: Measurement, modeling, and compensation of machine tool errors;International Journal of Machine Tools and Manufacture;2023-04
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