Cavity resonator-integrated guided-mode resonance filters with on-chip electro- and thermo-optic tuning

Abstract

Cavity resonator grating filters (CRIGFs) integrated on lithium niobate on insulator (LNOI) with electrical tuning elements are reported. The resonance wavelength of the filters is in the 780 nm range. Integrated thermo-optical tuning range of 2.5 nm is measured using integrated resistors, whilst a 0.7 nm electro-optical tuning range using capacitive metallic pads is achieved with ±400V drive voltage.