Flash-profilometry: fullfield lensless acquisition of spectral holograms for coherence scanning profilometry

Abstract

Flash-profilometry is a novel measurement approach based on the fullfield lensless acquisition of spectral holograms. It is based on spectral sampling of the mutual coherence function and the subsequent calculation of its propagation along the optical axis several times the depth-of-field. Numerical propagation of the entire coherence function, rather than solely the complex amplitude, allows to digitally reproduce a complete scanning white-light interferometric (WLI) measurement. Hence, the corresponding 3D surface profiling system presented here achieves precision in the low nanometer range along an axial measurement range of several hundred micrometers. Due to the lensless setup, it is compact, immune against dispersion effects and lightweight. Additionally, because of the spectral sampling approach, it is faster than conventional coherence scanning WLI and robust against mechanical distortions, such as vibrations and rigid body movements. Flash-profilometry is therefore suitable for a wide range of applications, such as surface metrology, optical inspection, and material science and appears to be particularly suitable for a direct integration into production environments.