Digital optical measurement system with multielement marks
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Published:2022-11-01
Issue:11
Volume:89
Page:661
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ISSN:1070-9762
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Container-title:Journal of Optical Technology
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language:en
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Short-container-title:J. Opt. Technol.
Author:
Korolev A. N.,Lukin A. Ya.,Filatov Yu. V.,Bokhman E. D.,Venediktov V. Yu.
Publisher
Optica Publishing Group
Subject
Applied Mathematics,Computational Mathematics,General Engineering,Atomic and Molecular Physics, and Optics