Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement
Author:
Publisher
The Optical Society
Reference26 articles.
1. The long-range scanning stage: a novel platform for scanned-probe microscopy
2. Sub-10 nm Linewidth and Overlay Performance Achieved with a Fine-Tuned EBPG-5000 TFE Electron Beam Lithography System
3. High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties
4. Self-calibration algorithm for testing out-of-plane errors of two-dimensional profiling stages
5. Modeling and measurement of surface displacements in BaTiO3 bulk material in piezoresponse force microscopy
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