On-chip Mach-Zehnder interferometer sensor with a double-slot hybrid plasmonic waveguide for high-sensitivity hydrogen detection

Abstract

An on-chip Mach-Zehnder interferometer (MZI) hydrogen sensor, applying a double-slot hybrid plasmonic (DSHP) waveguide composed of a Si waveguide and two Pd disks on both sides as the sensing arm, is designed. The optical confinement factor of the sensing area can be up to 87%. For the MZI hydrogen sensor with a DSHP waveguide of 14 µm, the sensitivity can be as high as 11.935 nm/%, corresponding to a free spectral range (FSR) of 15 nm. Furthermore, the sensor sensitivity is influenced by the MZI structure parameters, which is highly adjustable. The extinction ratio of the interference spectra can reach over 30 dB. A feasible solution is provided in this paper for highly sensitive hydrogen detection.