Retrace error calibration for interferometric measurements using an unknown optical system

Abstract

In classical interferometric null test measurements, the measurement and reference beam path should be the same. A difference in the beam paths results in the so called retrace error. One very common approach to avoid retrace errors is to adapt the measurement wavefront to the reference wavefront with a computer generated hologram (CGH), which is costly and time consuming. A much more flexible approach is to do non nulltest measurement in combination with mathematical treatment of retrace errors. Most of such methods are based on iterative optimization or calibration of the nominal optical design of the interferometer. While this may be a convenient solution in the context of research, the more common use may be limited due to the need of the optical design of all interferometer components. In many cases, the optical designs of standard off the shelf optical assemblies are not available or disclosed by the manufacturer. This is especially true for transmission spheres of interferometers. We introduce the so called Black Box Model (BBM), used in the well known Tilted Wave Interferometry (TWI), as a mathematical model to account for retrace errors in interferometry. The Black Box Model is based on point characteristic functions which are adapted to the result and behavior of a real interferometer by calibration. With an extended calibration method, the need of a specific optical design of the interferometer is no longer necessary. Thus the method is attractive for a wide field of use in interferometry with standard off the shelf components.