Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. Semiconductors turn soft: inorganic nanomembranes
2. Flexible microwave PIN diodes and switches employing transferrable single-crystal Si nanomembranes on plastic substrates
3. Stretchable Electronics: Materials Strategies and Devices
4. Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
5. Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays
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