Fabrication of three-dimensional autocloned photonic crystal on sapphire substrate
Author:
Publisher
The Optical Society
Reference13 articles.
1. Fabrication of submicrometre 3D periodic structures composed of Si/SiO2
2. Drilled alternating-layer three-dimensional photonic crystals having a full photonic band gap
3. Mechanism of shape formation of three-dimensional periodic nanostructures by bias sputtering
4. Surface profile control of the autocloned photonic crystal by ion-beam-sputter deposition with radio-frequency-bias etching
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