Author:
Farhoosh H.,Feldman M. R.,Lee S. H.,Guest C. C.,Fainman Y.
Abstract
Motivated by many attractive features and capabilities of electron beam lithography systems, which include large space band-width product (SBWP), direct writing at submicron resolution, and small distortion errors, we carried out an investigation on the suitability of various encoding methods of computer generated holograms (CGH) for e-beam fabrication.