Highly Efficient 13.5 nm Light Generation Using 2 μm Laser Driven Tin Plasma-Reference-Cited by-同舟云学术

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Highly Efficient 13.5 nm Light Generation Using 2 μm Laser Driven Tin Plasma

Published:2024 Issue: Volume:30 Page:ETu5A.3
ISSN:
Container-title:High-Brightness Sources and Light-Driven Interactions Congress
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Author:

Mostafa Y.,Behnke L.,Engels D. J.,Bouza Z.,Sheil J.,Ubachs W.,Versolato O. O.

Abstract

We demonstrate highly efficient 2 μm-wavelength laser-produced plasma light sources for nanolithographic applications, reaching efficiencies of up to 5%.

Publisher

Optica Publishing Group

Reference4 articles.

1. 1 GW peak power and 100 J pulsed operation of a diode-pumped Tm:YLF laser

2. High-energy parametric oscillator and amplifier pulsed light source at 2-µm

3. Short-wavelength out-of-band EUV emission from Sn laser-produced plasma

4. Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser

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