Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers
Author:
Publisher
The Optical Society
Subject
Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Design and Operation of ETA, an Automated Ellipsometer
2. Fourier transform detection system for rotating-analyzer ellipsometers
3. Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth
4. Broadband spectral operation of a rotating-compensator ellipsometer
5. Phase modulated ellipsometry from the ultraviolet to the infrared: In situ application to the growth of semiconductors
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2. Measurement uncertainty evaluation procedures and applications for various types of multichannel rotating-element spectroscopic ellipsometers;Optics Express;2021-11-10
3. Method for Analyzing the Measurement Error with Respect to Azimuth and Incident Angle for the Rotating Polarizer Analyzer Ellipsometer;Crystals;2021-03-29
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