Abstract
The rotary axis is the basis of rotational motion. The motion errors of a rotary axis have an extremely important impact on the accuracy of precision machining measuring equipment such as CNC machines, robot manipulators, and laser trackers. It is a difficult problem to realise the fast and precision simultaneous measurement of multi-degree-of-freedom motion errors of a rotary axis. Therefore, a novel method for the simultaneous measurement of six-degree-of-freedom motion errors of a rotary axis by a single-mode fiber coupled semiconductor laser is proposed in this paper. The corresponding system is developed, which has the advantages of high measurement efficiency, simple structure and low cost. A phase-solving method taking the advantages of both the eight-subdivision and the Cordic algorithm is proposed to solve the phase of interference signal, cannot only realize the high-resolution solving of the current signal phase but also quickly obtain high-precision interferometric results. A series of experiments were carried out on the developed system. An experimental system was built and a series of experiments were performed. The experimental results show that the standard deviation of stability for 1 hour of the six-degree-of-freedom measurement is 0.03 µm, 0.02 µm, 0.03 µm, 0.10′′, 0.05′′ and 0.03′′, respectively. The repeatability deviation of measuring a rotary axis is ±0.16 µm, ± 0.29 µm, ± 0.25 µm, ± 0.65′′, ± 0.62′′ and ±13.42′′, respectively. The maximum deviation of comparison with standard instruments is 0.46 µm, 1.00 µm, 0.49 µm, 1.06′′, 1.53′′ and 0.74′′, respectively. It provides a low-cost and high-precision measurement method for simultaneous measurement of six-degree-of-freedom motion errors of rotary axis of precision machining and measuring equipment.
Funder
National Natural Science Foundation of China
Ministry of Science and Technology of the People's Republic of China
Fundamental Research Funds for the Central Universities
Subject
Atomic and Molecular Physics, and Optics
Cited by
2 articles.
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