Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement-Reference-Cited by-同舟云学术

Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement

Published:2003-02-01 Issue:4 Volume:42 Page:682
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Mehta Dalip Singh,Hinosugi Hideki,Saito Shohei,Takeda Mitsuo,Kurokawa Takashi,Takahashi Hideki,Ando Masahito,Shishido Masataka,Yoshizawa Tetsuo

Publisher

The Optical Society

Reference17 articles.

1. Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry–Perot etalon device

2. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry

3. Profilometry with a coherence scanning microscope

4. Three-dimensional sensing of rough surfaces by coherence radar

5. High-speed noncontact profiler based on scanning white-light interferometry

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