Affiliation:
1. Chinese Academy of Sciences
2. University of Chinese Academy of Sciences
Abstract
Illumination-integrated nonuniformity (IINU) is a key factor in determining resolution and critical dimension uniformity, which are important performance parameters in advanced lithography systems. To further reduce the IINU, a uniformity correction technology was adopted. In this paper, a low-cost and simple-structure approach for uniformity correction with higher flexibility and better correction capability is proposed. The method is composed of two dynamic gray filters with a specific transmittance distribution, which can form different correction curves by controlling the displacement of the gray filters. The frequency limitation of the defocus uniformity correction system is analyzed. A uniformity correction system design method based on the particle swarm optimization algorithm is introduced. Based on the proposed method, a dynamic gray filter uniformity correction system is applied to an illumination optical system. The experimental results show that the value of the corrected IINU reaches less than 0.7%, which satisfies the IINU requirements of advanced lithography systems. This verifies the higher flexibility and better correction capability of the proposed method.
Funder
Youth Innovation Promotion Association CAS, Science and Technology Commission of Shanghai Municipality
National Natural Science Foundation of China
International Science Technology Cooperation Program of Shanghai
Intergovernmental International Cooperation Program in Science and Technology Innovation
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
5 articles.
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